Cleanroom

Chemicals

Acetic acid 99%

Acetone VLSI

Ethanol/abs. EMSURE IPA VLSIAZ4562

AZ 351 Developers

AZ 400

AZ EBR

TI35ES, reversal resist

H2O2 VLS

NH3OH VLSI

HCl 37% VLSI

HF 50% VSLI

BOE (HF buf.) VSL

H2SO4 96% VSLI

Ethyl lactate

Ormo com

Ormo Prime

PDMS, Sylgard 184

PMMA 950 A1

PMMA 495A

A Thinner

Toluene

SX-Ar-PC 50000/90.2

SU 8, 100

SU 8, 2025

SU 8, 3050

SU 8, 2075

NIL, mr-I 7020/7030

NIL 4% NXR 1025