Cleanroom

Chemicals

Acetone VLSI           
Ethanol/abs. EMSURE  IPA VLSI
AZ4562                       
AZ 351 Developers
AZ 400                        
AZ EBR                              
TI35ES, reversal resist
H2O2 VLS                  
NH3OH VLSI
HCl 37% VLSI            
HF 50% VSLI
BOE (HF buf.) VSL   
H2SO4 96% VSLI
Ethyl lactate
Ormo com                 
Ormo Prime
PDMS, Sylgard 184
PMMA 950 A1          
PMMA 495A                     
A Thinner
Toluene
SX-Ar-PC 50000/90.2
SU 8, 100                   
SU 8, 2025
SU 8, 3050                 
SU 8, 2075
NIL, mr-I 7020/7030         
NIL 4% NXR 1025

News

Professor Bo Brummersted Iversen, who was the driving force in financing the microscopes, gives a speech at the inauguration.

2015.01.21 | Renrum

Most advanced electron microscope

Aiming for complex self-assembling nanostructures