Overview:

• Three 4-inch guns are used for sputtering of various materials.

Applications:

• Amorphous and microcrystalline thin films for different applications are deposited in a vacuum chamber.

Specifications:

• RF (13.56MHz) power supply up to 300 W with automatic RF matching network 
• Gas:
• Non-toxic: N2, Ar, O2

Superuser:

• Bjarke Rolighed Jeppesen