Overview:
The Dektak XT is a stylus surface profiling system. It can measure thickness of thin-films, height of microstructures and surface roughness. The height measurement repeatability is <6Å.
Applications:
Microstructure height measurements, film inspection, surface roughness verification.
Specifications:
Max sampler size: 6 inch
Max sample thickness: 50 mm
Step height repeatability: 6 Å
Vertical Range: 1 mm
Vertical Resolution: 1 Å
Superuser:
Bjarke Rolighed Jeppesen