Ami Chand, Ph.D. APPNANO, Mountain View, California, USA

www.appnano.com

Ultra-high Resolution Thermal Imaging with a Nanoscale Thermometer Probe

The ability to make thermal measurements at the nanoscale is a significant challenge yet increasingly needed for process monitoring, materials characterization and failure analysis in the semiconductor and data storage industries, and for research in the life sciences.  Scanning thermal microscopy (SThM) is a promising technique for these applications.  The scanning probes currently used for SThM, however, are limited to a thermal resolution of about 100nm. 

APPNANO presents a novel thermal probe utilizing a nano-structured thermal sensor located directly at the apex of a tip.  The probe is superior in performance by an order of magnitude compared to probes currently in the market, having a lateral thermal resolution less than 20nm.  The probe is also capable of measuring local temperatures up to 700°C.  The presentation provides insight into the unique design aspects and thermal imaging using the probe. 

APPNNAPO is a leading manufacturer of probes and accessories for Scanning Probe Microscopes in USA. The company leverages its in-house modern clean-room to develop advanced nanotechnology enabling products. The talk will include a brief overview of the company products and technology.