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4-inch sputter system

4-inch sputter system

Overview:

  • Three 4-inch guns are used for sputtering of various materials.

Applications:

  • Amorphous and microcrystalline thin films for different applications are deposited in a vacuum chamber.

Specifications:

  • RF (13.56MHz) power supply up to 300 W with automatic RF matching network 
  • Gas:
  • Non-toxic: N2, Ar, O2

Superuser:

  • Bjarke Rolighed Jeppesen