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WPA/APV for Cryofox PECVD - iNANO Cleanroom

Document Responsible: Bjarke Rolighed Jeppesen

Date: 15 June 2021

  1. Purpose/Formål
    1. The purpose of this APV instruction is to ensure that users, in the iNANO cleanroom, are aware of the potential dangers that exist when working with the PECVD. Users should be aware of the potential hazards listed below. The aim of this APV instruction is also to prevent personal injury to maintenance personnel.
  2. The Instrument/Instrumentet
    1. The instrument has a load station for 100 x 100 mm samples. The sample can be transferred from load station to one of 4 process chambers. One chamber for silicon deposition. One chamber for Boron doped silicon deposition and one chamber for Phosphorous doped silicon deposition. A fourth chamber with hot filament deposition (HFCVD).
  3. Hazardous Conditions/Risiko
    1. The instrument is using toxic process gasses; SiH4, SiF4, TMB, PH3. Gas detectors are constantly monitoring process gas levels in the air at three selected extraction points; At the load station, in the gas distribution cabinet, and above the instrument. If a leak is detected, all process gasses are automatically stopped and high exhaust flow is started above the instrument.
  4. Protective Clothing/Beskyttelsesdragt
    1. A cleanroom suit and gloves must be worn.
  5. Identification/Identifikation
    1. Gases used at the PECVD equipment:
    2. Toxic: SiH4, SiF4, TMB, PH3
    3. Non-toxic: CH4, H2, N2, CF4, Ar, CO2
  6. Maintenance/Vedligeholdelse
    1. When opening chambers for service/cleaning, wear full face mask with fresh air supply. Before opening chambers make sure that all gas lines are closed and chambers have been ventilated with N2. Do not work alone.
  7. Additional Safety Notes/Ekstra sikkerhed
    1. When operating the PECVD make sure that the scrubber is on (575 deg C). Do not enter the shielding around the instrument when it is in operation.
  8. Electrical Safety/ El sikkerhed
    1. Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is recommended to work in pairs when undertaking work on live systems.