Overview:

The Dektak XT is a stylus surface profiling system. It can measure thickness of thin-films, height of microstructures and surface roughness. The height measurement repeatability is  <6Å.

Applications:

Microstructure height measurements, film inspection, surface roughness verification.

Specifications:

Max sampler size: 6 inch
Max sample thickness: 50 mm
Step height repeatability: 6 Å
Vertical Range: 1 mm
Vertical Resolution: 1 Å

Superuser:

  Bjarke Rolighed Jeppesen