Document Responsible: Bjarke Rolighed Jeppesen
Date: 15 June 2021
The purpose of this APV instruction is to ensure that users, in the iNANO cleanroom, are aware of the potential dangers that exist when working with the Cryofox Explorer 500 GLAD. Users should be aware of the potential hazards listed below. The aim of this APV instruction is also to prevent personal injury to maintenance personnel.
The instrument is made of a load-lock chamber pumped by a turbo molecular pump, and a deposition chamber pumped by a cryogenic pump, allowing a short pumping time and a high throughput. The main chamber is equipped with a multi pocket electron beam evaporator and an ion gun source. The substrate holder can be tilted from 0° to 90°, and at the same time be rotated at various speeds. It can deposit three-dimension ordered arrays of nanostructures of various materials.
A cleanroom suit and gloves must be worn when handling process chamber and associated vacuum components. Special filtered glasses must be used if looking into the main chamber during evaporation to prevent eye damage caused by radiation.
The following evaporation materials can be found in the Cryofox Explorer 500 GLAD:
Non-toxic: Au, Ti, SiO2, Al, Ag
5.1) Cleaning/general maintenance: The main chamber is cleaned once every 1-2 weeks with a vacuum cleaner to remove strips of metal on the liners. Glass slides are replaced to allow continued vision into the chamber. All pockets are checked and validated to have the correct material and enough material for evaporation.
5.2) Replacing Materials: Replacing materials should only be done by experienced users. The main chamber is vented and when changing from one material to another in a pocket the user also changes the material constants in the software to the new material.
5.3) Replacing QCM crystal: The QCM crystal should be changed when the crystal life reaches 40% corresponding to a 6% decrease in optimal operating frequency.
Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.
It is recommended to work in pairs when undertaking work on live systems.
When working inside, the main chamber surfaces should be grounded by the wired rod on the front of the machine.