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WPA/APV

CLEANROOM – iNANO

APV for Mask Aligner EVG 610

 

Document Responsible: Bjarke Rolighed Jeppesen            

Date: 15 June 2021

 

1) Purpose/Formål

The purpose of this APV instruction is to ensure that users, in the iNANO cleanroom, are aware of the potential dangers that exist when working with the Mask Aligner EVG 610. Users should be aware of the potential hazards listed below. The aim of this APV instruction is also to prevent personal injury to maintenance personnel.

 

2) The Instrument/Instrumentet

The instrument is composed of an aligner and an ultraviolet (UV) lamp. Prior to lithography, the aligner is used to properly position the photomask with respect to the substrate pattern from earlier steps.

 

3) Hazardous Conditions/Risiko

This machine may expose users to UV radiation. Do not touch the lens underneath the lamp hood as it may damage the machine and cause severe burns. The instrument have mechanical moving parts and fingers can be damaged if squeezed between moving parts. Exposure to pressurized gas, high voltage electricity and mercury vapor may result from improper use of this equipment.

 

4) Protective Clothing/Beskyttelsesdragt

A cleanroom suit and gloves must be worn when handling masks, wafers and associated components. UV-blocking goggles must be worn to protect eyes during the UV exposure.

 

5) Identification/Identifikation

 

Toxic: Mercury (UV-lamp)

 

Hazard statements:

H330 Fatal if inhaled.

H360D May damage the unborn child.

H372 Causes damage to organs through prolonged or repeated exposure.

H410 Very toxic to aquatic life with long lasting effects.

 

6) Maintenance/Vedligeholdelse

Only the super-user is allowed to change the mercury lamp. Make sure that the lamp and the lamp house is cold when changing the lamp. During lamp alignment, to avoid UV exposure to the eyes, the super-user must use UV protection eye ware. 

 

7) Additional Safety Notes/Ekstra sikkerhed

There is a small risk that the UV mercury lamp breaks and releases mercury vapor. Therefore, an exhaust is fitted around the lamp housing for removal of mercury vapor.   

 

8) Electrical Safety/ Elsikkerhed

The instrument is CE marked. Unauthorized use or repair of the instrument may compromise electrical safety.