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WPA/APV

 

CLEANROOM – iNANO

APV for Nanoimprinter NX-2600BA

 

Document Responsible: Bjarke Rolighed Jeppesen

Date: 15 June 2021

 

1) Purpose/Formål

The purpose of this APV instruction is to ensure that users, in the iNANO cleanroom, are aware of the potential dangers that exist when working with the Nanoimprinter NX-2600BA. Users should be aware of the potential hazards listed below. The aim of this APV instruction is also to prevent personal injury to maintenance personnel.

 

 

2) The Instrument/Instrumentet

The instrument is made of an imprinting chamber connected to a vacuum pump and high (up to 550 psi)/low pressure (85 – 105 psi) nitrogen lines which permit precise control over imprint pressure and temperature. The imprinting chamber is equipped with a UV lamp for UV nanoimprinting. The instrument is also equipped with a photolithography aligner with front and backside alignment capability. Thermal, photo-curable, embossing and photolithography can be conducted. The instrument is capable of imprinting up to 6” wafers.

 

3) Hazardous Conditions/Risiko

Maintenance personnel must be aware of, and act accordingly to, local conditions of potential high temperature and low/high pressure nitrogen gas.

 

4) Protective Clothing/Beskyttelsesdragt

A cleanroom suit and gloves must be worn.

 

5) Identification/Identifikation

The following chemicals are used in the Nanoimprinter NX-2600BA:

Toxic: none

Non-toxic: N2

 

6) Electrical Safety/ Elsikkerhed

Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is recommended to work in pairs when undertaking work on live systems.