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WPA/APV

CLEANROOM – iNANO

APV for Nanoimprinter NX-2600BA

 

Document Responsible: Ryosuke Ogaki

Date: January 30, 2014

 

 

1)    Purpose/Formål

The purpose of this APV instruction is to ensure that employees at iNANO are aware of the potential dangers that exist when working with the Nanoimprinter NX-2600BA located inside the cleanroom facility. The aim of this APV instruction is also to prevent personal injury to maintenance personnel of the Nanoimprinter NX-2600BA. All users who work on the Nanonex NX-2600BA should be aware of the potential hazards listed.

 

2)    The Instrument/Instrumentet

The instrument is made of an imprinting chamber connected to a high pressure vacuum pump and high (up to 550 psi)/low pressure (85 – 105 psi) nitrogen lines which permit precise control over imprint pressure and temperature. The imprinting chamber is equipped with UV lamp for UV nanoimprinting. The instrument is also equipped with a photolithography aligner with front and backside alignment capability. Thermal, photo-curable, embossing and photolithography can be conducted with sub-5 nm imprinting resolution and sub-1 micrometer alignment accuracy. The instrument is capable of imprinting up to 8” wafers and smart sample holder can be employed for handling different sizes and irregular shapes.

 

3)    Hazardous Conditions/Risiko

Maintenance personnel must be aware of, and act accordingly to, local conditions of potential high temperature and low/high pressure nitrogen gas.

 

4)    Protective Clothing/Beskyttelsesdragt

As a minimum requirement a cleanroom suit, gloves and should be worn when handling process chamber and associated vacuum components.

 

5)    Identification/Identifikation

The following chemicals can be found in the Nanoimprinter NX-2600BA:

Toxic: none

Non-toxic: N2

 

6) Electrical Safety/ El sikkerhed

Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is also recommended to work in pairs when undertaking work on live systems.