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WPA/APV

CLEANROOM – iNANO

APV for Spectroscopic Ellipsometer SE850

 

Document Responsible: Bjarke Rolighed Jeppesen

Date: 17 June 2021

 

1) Purpose/Formål

The purpose of this APV instruction is to ensure that users, in the iNANO cleanroom, are aware of the potential dangers that exist when working with the Spectroscopic Ellipsometer SE850. Users should be aware of the potential hazards listed below. The aim of this APV instruction is also to prevent personal injury to maintenance personnel.

 

2) The Instrument/Instrumentet

The spectroscopic ellipsometers can measure film thickness and refractive index of single layers, and multi‑layer stacks. Related properties of bulk materials, isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. The instrument has a moveable sample holder and two moveable arms. One arm emits light to the sample and the other arm receives the reflected light from the sample. The instrument can also measure sample film thickness by a reflectometer (>100 nm). The spectroscopic ellipsometer has a broad scanning range from the near UV to the near infrared (285 - 2500 nm).

 

3) Hazardous Conditions/Risiko

Stay away when the arms and table are moved.

 

4) Protective Clothing/Beskyttelsesdragt

A cleanroom suit and gloves must be worn. Use protective eyewear when handling the old and the new Xe-lamp.

 

5) Identification/Identifikation

No chemicals.

Toxic: non

Non-toxic: non

 

6) Maintenance/Vedligeholdelse

Take care when removing the old Xe-lamp and mounting a new Xe-lamp at the ellipsometer. The lamp has a high pressure inside so be careful not to drop it, scratch it or apply excessive force to it which could make it explode.

 

7) Electrical Safety/Elsikkerhed

Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is recommended to work in pairs when undertaking work on live systems.