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WPA/APV

CLEANROOM – iNANO

APV for Spectroscopic Ellipsometer SE850

 

Document Responsible: John L Hansen

Date:24 Jan 2014

 

1)    Purpose/Formål

The purpose of this APV instruction is to prevent personal injury when working with the ellipsometer located inside the iNANO cleanroom facility. All users and maintenance personnel who work on the ellipsometer should be aware of the potential hazards listed.

 

2)    The Instrument/Instrumentet

The instrument is made of a small sample table with two arms connected to the table. Both the arms and the table can be moved by the software (Spectraray3). The instrument can measure a sample layer thickness in two ways by either ellipsometer or by reflectometer. In both measurements a scanning spectrometer is used. With this instrument it is possible to extend the ellipsometer scanning area to the near infrared (285 - 2500 nm).

 

3)    Hazardous Conditions/Risiko

Stay away when the arms and table are moved.

 

4)    Protective Clothing/Beskyttelsesdragt

As a minimum requirement a cleanroom suit and gloves should be worn when handling samples. Use protective eyewear when handling the old and the new Xe-lamp.

 

5)    Identification/Identifikation

No chemicals.

Toxic: non

Non-toxic: non

 

6)    Maintenance/Vedligeholdelse

Take care when removing the old Xe-lamp and mounting a new Xe-lamp at the ellipsometer. The lamp has a high pressure inside so be careful not to drop it, scratch it or apply excessive force to it which might cause it to rupture.

 

7) Electrical Safety/ El sikkerhed

Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is also recommended to work in pairs when undertaking work on live systems.