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Thermco M2454 4-stack oven

Overview:

Thermco M2454 has 4 ovens, each controlled by a TMX controller. The TMX controllers communicates with a central PC, providing a full graphical user interface for setup, recipe writing and data collection/ analysis.

Applications:

Two of the 4 oven’s are reserved for in diffusion of phosphorous and boron. One oven for oxide growth on Si and the last oven for annealing of Si samples/wafers.

Specifications:

Max temperature: 1050 ºC

Gas: O2, N2, Compressed air

 

Superuser:

John Lundsgaard Hansen