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WPA/APV

CLEANROOM – iNANO

APV for 4-stack oven

 

Document Responsible: John L. Hansen

Date: 24 Jan 2014

 

1)    Purpose/Formål

The purpose of this APV instruction is to prevent personal injury when working with the 4-stack oven located inside the iNANO cleanroom facility. All users and maintenance personnel who work on the 4-stack oven should be aware of the potential hazards listed.

 

2)    The Instrument/Instrumentet

The instrument is made of 4 quartz tubes. Each tube has its own heater (max 1050 deg. C) and its own PC. All 4 PC’s are connected to a central PC on which the anneal-programs are written and uploaded to one of the 4 local PC’s. All runs are data logged and data are collected at the central PC.

 

3)    Hazardous Conditions/Risiko

There is a risk for skin burn when moving samples out at high temperatures. The equipment gives no limitation to when the samples can be moved out of the oven, so take care.

 

4)    Protective Clothing/Beskyttelsesdragt

As a minimum requirement a cleanroom suit and gloves should be worn when handling samples. Use protective eyewear when moving samples out of the oven at high temperatures.

 

5)    Identification/Identifikation

The following known chemicals, used in the oven on wafers/samples, can possibly be found in the tubes and in the exhaust:

Toxic: see description of the applied diffusion paste

Non-toxic: Red phosphorus, Boron

 

6)    Maintenance/Vedligeholdelse

Take care when handling the carriers or tubes (Siliciumcarbide or quartz) (fragile).

 

7) Additional Safety Notes/Ekstra sikkerhed

Make sure that the exhaust is working before starting an annealing process. Check also the incoming gas pressures (N2, O2 and compressed air).

 

8) Electrical Safety/ El sikkerhed

Potentially lethal voltages are present on the equipment. To prevent personal injury, ensure the system, circuit or component is isolated from its source of supply prior to undertaking any maintenance or repair of the equipment. Do not rely on control system interlocks or display messages as an indication that it is safe to work on potentially hazardous items.

It is also recommended to work in pairs when undertaking work on live systems.